검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Properties of SiAlO2N protective coatings on surface acoustic wave devices Sturtevant BT, da Cunha MP, Lad RJ Thin Solid Films, 534, 198, 2013 |
| 2 |
Polycrystalline AlN films with preferential orientation by plasma enhanced chemical vapor deposition Sanchez G, Wu A, Tristant P, Tixier C, Soulestin B, Desmaison J, Alles AB Thin Solid Films, 516(15), 4868, 2008 |
| 3 |
Control of preferential orientation of AlN films prepared by the reactive sputtering method Ishihara M, Li SJ, Yumoto H, Akashi K, Ide Y Thin Solid Films, 316(1-2), 152, 1998 |