검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Shallow Trench Isolation for Ultra-Large-Scale Integrated Devices Blumenstock K, Theisen J, Pan P, Dulak J, Ticknor A, Sandwick T Journal of Vacuum Science & Technology B, 12(1), 54, 1994 |
| No. | Article |
|---|---|
| 1 |
Shallow Trench Isolation for Ultra-Large-Scale Integrated Devices Blumenstock K, Theisen J, Pan P, Dulak J, Ticknor A, Sandwick T Journal of Vacuum Science & Technology B, 12(1), 54, 1994 |