화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Integrated atomic force microscopy array probe with metal-oxide-semiconductor field effect transistor stress sensor, thermal bimorph actuator, and on-chip complementary metal-oxide-semiconductor electronics
Akiyama T, Staufer U, de Rooij NF, Lange D, Hagleitner C, Brand O, Baltes H, Tonin A, Hidber HR
Journal of Vacuum Science & Technology B, 18(6), 2669, 2000
2 Application of MHz-Frequency Detection to Noncontact Scanning Force Microscopy
Hug HJ, Moser A, Weller D, Parashikov I, Tonin A, Hidber HR, Guntherodt HJ
Journal of Vacuum Science & Technology B, 12(3), 1591, 1994