검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Remote hydrogen microwave plasma chemical vapor deposition from methylsilane precursors. 1. Growth mechanism and chemical structure of deposited a-SiC:H films Wrobel AM, Walkiewicz-Pietrzykowska A, Uznanski P Thin Solid Films, 564, 222, 2014 |