검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Filling the Microscopic-scale Spaces with Polyamic Acid and Polyimide of the PMDA-ODA and PMDA-TFDB Pairs Using Supercritical Carbon Dioxide at Low Deposition Temperature Wasada A, Haruki M, Kihara S, Takishima S Journal of Chemical Engineering of Japan, 52(2), 222, 2019 |
| 2 |
Deposition of fluorinated polyimide consisting of 6FDA and TFDB into microscale trenches using supercritical carbon dioxide Haruki M, Oda A, Wasada A, Kihara S, Takishima S Journal of Supercritical Fluids, 119, 238, 2017 |
| 3 |
Deposition of PMDA-TFDB type polyimide onto microscale trenches patterned on silicon wafer using supercritical carbon dioxide Haruki M, Wasada A, Hosokawa Y, Kihara S, Takishima S Journal of Supercritical Fluids, 127, 200, 2017 |