검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Challenges in plasma etching and patterning for fabrication of new systems and devices Engelhardt M, Weinrich V, Nagel N, Hartner W Journal of Vacuum Science & Technology A, 17(4), 1536, 1999 |
| No. | Article |
|---|---|
| 1 |
Challenges in plasma etching and patterning for fabrication of new systems and devices Engelhardt M, Weinrich V, Nagel N, Hartner W Journal of Vacuum Science & Technology A, 17(4), 1536, 1999 |