화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Effect of electric field on chemical bonds of carbon-doped silicon oxide as evidenced by in situ Fourier transform infrared spectroscopy
Yiang KY, Yoo WJ, Krishnamoorthy A
Journal of Vacuum Science & Technology B, 23(2), 433, 2005
2 Impact of buried capping layer on electrical stability of advanced interconnects
Yiang KY, Yoo WJ, Krishnamoorthy A
Journal of Vacuum Science & Technology B, 23(4), 1499, 2005
3 Electric field-enhanced degradation of porous methylsilsesquioxane polymer as observed by in situ FTIRS
Yiang KY, Yoo WJ, Krishnamoorthy A
Electrochemical and Solid State Letters, 7(12), F99, 2004
4 Study of leakage mechanisms of the copper/Black Diamond(TM) damascene process
Yiang KY, Guo Q, Yoo WJ, Krishnamoorthy A
Thin Solid Films, 462-63, 330, 2004