검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Stress and image-placement distortions of 200 mm low-energy electron projection lithography masks Eguchi H, Susa T, Sumida T, Kurosu T, Yoshii T, Yotsui K, Itoh K, Tamura A, Engelstad RL, Lovell EG, Azkorra X, Mikkelson A, Chang J, Janowski SM Journal of Vacuum Science & Technology B, 22(6), 3087, 2004 |