화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Secondary-Ion Mass-Spectroscopy Ultrashallow Depth Profiling for Si/Si1-xGex/Si Heterojunction Bipolar-Transistors
Kruger D, Kurps R, Heinemann B, Herzel F, Zeindl HP
Journal of Vacuum Science & Technology B, 14(1), 287, 1996
2 Characterization of B and Sb Delta-Doping Profiles in Si and Si1-xGex Alloys Grown by Molecular-Beam Epitaxy
Kruger D, Gaworzewski P, Kurps R, Zeindl HP
Journal of Vacuum Science & Technology B, 14(1), 341, 1996