검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Aligned dense single-walled carbon nanotube beams and cantilevers for nanoelectromechanical systems applications Lu M, Jang MW, Campbell SA, Cui TH Journal of Vacuum Science & Technology B, 28(3), 522, 2010 |
| 2 |
Surface-Energy Characterization of Full-Wafer Bonds Using the Concealed Blister Test Method Rabold M, Busch D, Goldschmidtboeing F, Woias P Electrochemical and Solid State Letters, 12(5), H176, 2009 |
| 3 |
Microelectromechanical systems motion measurement and modal analysis based on Doppler interferometry Zhang GX, Zhong Y, Hong X, Leng CL Journal of Vacuum Science & Technology B, 27(3), 1251, 2009 |