| 1 |
Preferential sputtering effects in depth profiling of multilayers with SIMS, XPS and AES
Hofmann S, Zhou G, Kovac J, Drev S, Lian SY, Lin B, Liu Y, Wang JY
Applied Surface Science, 483, 140, 2019 |
| 2 |
Evaluation of sputtering induced surface roughness development of Ni/Cu multilayers thin films by Time-of-Flight Secondary Ion Mass Spectrometry depth profiling with different energies O-2(+) ion bombardment
Yan XL, Duvenhage MM, Wang JY, Swart HC, Terblans JJ
Thin Solid Films, 669, 188, 2019 |
| 3 |
Inorganic material profiling using Ar-n(+) cluster: Can we achieve high quality profiles?
Conard T, Fleischmann C, Havelund R, Franquet A, Poleunis C, Delcorte A, Vandervorst W
Applied Surface Science, 444, 633, 2018 |
| 4 |
Depth resolution and preferential sputtering in depth profiling of delta layers
Hofmann S, Lian SY, Han YS, Liu Y, Wang JY
Applied Surface Science, 455, 1045, 2018 |
| 5 |
Correlation of depth resolution and preferential sputtering in depth profiles of thin layers by Secondary Ion Mass Spectrometry (SIMS)
Hofmann S, Lian SY, Han YS, Deng QR, Wang JY
Thin Solid Films, 662, 165, 2018 |
| 6 |
Quantitative evaluation of sputtering induced surface roughness and its influence on AES depth profiles of polycrystalline Ni/Cu multilayer thin films
Yan XL, Coetsee E, Wang JY, Swart HC, Terblans JJ
Applied Surface Science, 411, 73, 2017 |
| 7 |
Depth resolution and preferential sputtering in depth profiling of sharp interfaces
Hofmann S, Han YS, Wang JY
Applied Surface Science, 410, 354, 2017 |
| 8 |
Investigation of interdiffusion and depth resolution in Cu/Ni multilayers by means of AES depth profiling
Yan XL, Liu Y, Swart HC, Wang JY, Terblans JJ
Applied Surface Science, 364, 567, 2016 |
| 9 |
Reliability of multiresolution deconvolution for improving depth resolution in SIMS analysis
Boulakroune M
Applied Surface Science, 386, 24, 2016 |
| 10 |
Quantitative reconstruction of the GDOES sputter depth profile of a monomolecular layer structure of thiourea on copper
Liu Y, Jian W, Wang JY, Hofmann S, Shimizu K
Applied Surface Science, 331, 140, 2015 |
