화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Novel polysilicon gate engineering with a laser thermal process for sub-40 nm CMOS devices
Yamamoto T, Okabe K, Kubo T, Goto K, Morioka H, Wang Y, Lin T, Talwar S, Kase M, Sugii T
Solid-State Electronics, 48(10-11), 1837, 2004
2 Improved current drivability and poly-gate depletion of submicron PMOSFET with poly-SiGe gate and ultra-thin nitride gate dielectric
Chen CH, Fang YK, Yang CW, Ting SF, Tsair YS, Chang CN, Hou TH, Wang MF, Yu MC, Lin CL, Chen SC, Yu CH, Liang MS
Solid-State Electronics, 46(4), 597, 2002