검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Low temperature deposition of a-SiC:H thin films applying a dual plasma source process Frischmuth T, Schneider M, Radovic IB, Siketic Z, Maurer D, Grille T, Schmid U Thin Solid Films, 616, 164, 2016 |
| 2 |
Optimization of the Deposition Parameters of DLC Coatings with the IC-PECVD Method Singh TP, Jatti VS Particulate Science and Technology, 33(2), 119, 2015 |
| 3 |
Low dielectric constant plasma polymerized methyl-cyclohexane thin films deposited by inductively coupled plasma-enhanced chemical vapor deposition Jo H, Quan YC, Jung D Thin Solid Films, 384(1), 33, 2001 |