검색결과 : 5건
No. | Article |
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1 |
A new fabrication method of low stress PECVD SiNx layers for biomedical applications Wei HS, Ong PL, Tay FEH, Iliescu C Thin Solid Films, 516(16), 5181, 2008 |
2 |
Characterisation of silicon carbide films deposited by plasma-enhanced chemical vapour deposition Iliescu C, Chen BT, Wei JS, Pang AJ Thin Solid Films, 516(16), 5189, 2008 |
3 |
Electroformed iron and FeCo alloy Myung NV, Park DY, Urgiles DE, George T Electrochimica Acta, 49(25), 4397, 2004 |
4 |
Low stress TiB2 coatings with improved tribological properties Berger M, Karlsson L, Larsson M, Hogmark S Thin Solid Films, 401(1-2), 179, 2001 |
5 |
LPCVD deposition of silicon nitride assisted by high density plasmas Zambom LS, Mansano RD, Furlan R, Verdonck P Thin Solid Films, 343-344, 299, 1999 |