화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 A new fabrication method of low stress PECVD SiNx layers for biomedical applications
Wei HS, Ong PL, Tay FEH, Iliescu C
Thin Solid Films, 516(16), 5181, 2008
2 Characterisation of silicon carbide films deposited by plasma-enhanced chemical vapour deposition
Iliescu C, Chen BT, Wei JS, Pang AJ
Thin Solid Films, 516(16), 5189, 2008
3 Electroformed iron and FeCo alloy
Myung NV, Park DY, Urgiles DE, George T
Electrochimica Acta, 49(25), 4397, 2004
4 Low stress TiB2 coatings with improved tribological properties
Berger M, Karlsson L, Larsson M, Hogmark S
Thin Solid Films, 401(1-2), 179, 2001
5 LPCVD deposition of silicon nitride assisted by high density plasmas
Zambom LS, Mansano RD, Furlan R, Verdonck P
Thin Solid Films, 343-344, 299, 1999