화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Ion acceleration in non-equilibrium plasmas driven by fast drifting electron
Castro G, Di Bartolo F, Gambino N, Mascali D, Romano FP, Anzalone A, Celona L, Gammino S, Di Giugno R, Lanaia D, Miracoli R, Serafino T, Tudisco S
Applied Surface Science, 272, 59, 2013
2 Effects of interelectrode gap on high frequency and very high frequency capacitively coupled plasmas
Bera K, Rauf S, Ramaswamy K, Collins K
Journal of Vacuum Science & Technology A, 27(4), 706, 2009
3 Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O-2
Nakao S, Stamate E, Sugai H
Thin Solid Films, 515(12), 4869, 2007
4 A hybrid solution of non-uniform planar-type inductively coupled plasma-heating problem
Yoon NS, Park BH, Kim JH, Shin YH
Thin Solid Films, 435(1-2), 293, 2003
5 Effect of gradient a-SiCx interlayer on adhesion of DLC films
Lung BH, Chiang MJ, Hon MH
Materials Chemistry and Physics, 72(2), 163, 2001