검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Next-generation virtual metrology for semiconductor manufacturing: A feature-based framework Suthar K, Shah D, Wang J, He QP Computers & Chemical Engineering, 127, 140, 2019 |
| 2 |
Feature space monitoring for smart manufacturing via statistics pattern analysis He QP, Wang J, Shah D Computers & Chemical Engineering, 126, 321, 2019 |
| 3 |
A feature-based soft sensor for spectroscopic data analysis Shah D, Wang J, He QP Journal of Process Control, 78, 98, 2019 |
| 4 |
A novel process monitoring and fault detection approach based on statistics locality preserving projections He F, Xu JW Journal of Process Control, 37, 46, 2016 |
| 5 |
A local and global statistics pattern analysis method and its application to process fault identification Zhang HY, Tian XM, Deng XG, Cai LF Chinese Journal of Chemical Engineering, 23(11), 1782, 2015 |
| 6 |
Statistics Pattern Analysis: A New Process Monitoring Framework and its Application to Semiconductor Batch Processes He QP, Wang J AIChE Journal, 57(1), 107, 2011 |