Y1 - Y1 |
Preface-Advances in Electrochemical Processes for Interconnect Fabrication in Integrated Circuits Akolkar R, Broekmann P |
D3001 - D3005 |
Deposition of Copper Nanofilms by Surface-Limited Redox Replacement of Underpotentially Deposited Lead on Polycrystalline Gold Dornhof J, Urban GA, Kieninger J |
D3006 - D3012 |
Effect of Reverse Pulse on Additives Adsorption and Copper Filling for Through Silicon Via Zhu QS, Zhang X, Liu CZ, Liu HY |
D3013 - D3021 |
Pb Monolayer Mediated Thin Film Growth of Cu and Co: Exploring Different Concepts Wu D, Solanki DJ, Joi A, Dordi Y, Dole N, Litvnov D, Brankovic SR |
D3022 - D3034 |
Bottom-up Filling of Damascene Trenches with Gold in a Sulfite Electrolyte Josell D, Moffat TP |
D3035 - D3041 |
Aluminum Electrochemical Nucleation and Growth onto a Glassy Carbon Electrode from a Deep Eutectic Solvent Rodriguez-Clemente E, Manh TL, Guinto-Pano CE, Romero-Romo M, Mejia-Caballero I, Morales-Gil P, Palacios-Gonzalez E, Ramirez-Silva MT, Palomar-Pardave M |
D3042 - D3048 |
Modeling of the Coadsorption of Chloride and Hydrogen Ions on Copper Electrode Surface Yang HL, Dianat A, Bobeth M, Cuniberti G |
D3049 - D3057 |
Review-In-Situ Surface X-ray Diffraction Studies of Copper Electrodes: Atomic-Scale Interface Structure and Growth Behavior Grunder Y, Stettner J, Magnussen OM |
D3058 - D3065 |
Observation of the Behavior of Additives in Copper Electroplating Using a Microfluidic Device Akita T, Tomie M, Ikuta R, Egoshi H, Hayase M |
D3066 - D3071 |
Bottom-Up Copper Filling of Large Scale Through Silicon Vias for MEMS Technology Menk LA, Josell D, Moffat TP, Baca E, Blain MG, Smith A, Dominguez J, McClain J, Yeh PD, Hollowell AE |
D3072 - D3096 |
Review-Management of Copper Damascene Plating Carpio R, Jaworski A |
D3097 - D3099 |
Communication-Electrodeposition of Nano-Twinned Cu in Void-Free Filling for Blind Microvia of High Density Interconnect Zhu QS, Zhang X, Li SJ, Liu CZ, Li CF |
D3100 - D3109 |
Annealing and Impurity Effects in Co Thin Films for MOL Contact and BEOL Metallization Kelly J, Kamineni V, Lin X, Pacquette A, Hopstaken M, Liang Y, Amanapu H, Peethala B, Jiang L, Demarest J, Shobha H, Raymond M, Haran B |
D3110 - D3119 |
Aspects and Modeling of Oscillatory Acid Copper Electroplating Haubner K, Fischer T, Brunner H, Pohlmann L, Donner C |
D3120 - D3128 |
NTBC and MTT Reduction Electrochemistry: Impact on Cu Superconformal Plating for Fabrication of Glass Interposers Li JX, Dimitrov N |
D3129 - D3135 |
Differential Inhibition during Cu Electrodeposition on Ru: Combined Electrochemical and Real-Time TEM Studies Vereecken PM, Radisic A, Ross FM |
D3136 - D3141 |
Mechanism of Cobalt Bottom-Up Filling for Advanced Node Interconnect Metallization Wu J, Wafula F, Branagan S, Suzuki H, van Eisden J |
D3142 - D3154 |
Pulsed Galvanostatic Electrodeposition of Copper on Cobalt Using a pH-Neutral Plating Bath and Electroless Seeds Simpson DE, Johnson CA, Roy D |
D3155 - D3157 |
Communication-Defect-Free Filling of High Aspect Ratio Through Vias in Ultrathin Glass Chang YH, Tseng PL, Lin JC, Chen JC, Huang MC, Lin HY, Pollard S, Mazumder P |
D3158 - D3166 |
Epitaxial Bonding and Transfer Processes for Large-Scale Heterogeneously Integrated Electronic-Photonic Circuitry Carlson JA, Williams CG, Ganjoo M, Dallesasse JM |
D3167 - D3174 |
The Critical Role of pH Gradient Formation in Driving Superconformal Cobalt Deposition Rigsby MA, Brogan LJ, Doubina NV, Liu YH, Opocensky EC, Spurlin TA, Zhou J, Reid JD |
D3175 - D3181 |
Effects of Dimethylglyoxime and Cyclohexane Dioxime on the Electrochemical Nucleation and Growth of Cobalt Hu Y, Huang Q |
D3182 - D3189 |
Modeling of Dendrite Formation as a Consequence of Diffusion-Limited Electrodeposition Lupo C, Schlettwein D |
D3190 - D3199 |
Review-Laser Ablation Ionization Mass Spectrometry (LIMS) for Analysis of Electrodeposited Cu Interconnects Grimaudo V, Moreno-Garcia P, Riedo A, Lopez AC, Tulej M, Wiesendanger R, Wurz P, Broekmann P |
D3200 - D3204 |
High-Resolution Nanoprinting Approach through Self-Driven Electrodeposition Feng ZG, Xie YY, Georgescu NS |
D3205 - D3211 |
Palladium Nanoparticles Electrodeposition onto Glassy Carbon from a Deep Eutectic Solvent at 298 K and Their Catalytic Performance toward Formic Acid Oxidation Espino-Lopez IE, Romero-Romo M, de Oca-Yemha MGM, Morales-Gil P, Ramirez-Silva MT, Mostany J, Palomar-Pardave M |
D3212 - D3218 |
The Effects of Plating Current, Grain Size, and Electrolyte on Stress Evolution in Electrodeposited Ni Rao Z, Hearne SJ, Chason E |
D3219 - D3225 |
Review-Ruthenium as Diffusion Barrier Layer in Electronic Interconnects: Current Literature with a Focus on Electrochemical Deposition Methods Bernasconi R, Magagnin L |
D3226 - D3231 |
Galvanostatic Plating with a Single Additive Electrolyte for Bottom-Up Filling of Copper in Mesoscale TSVs Menk LA, Baca E, Blain MG, McClain J, Dominguez J, Smith A, Hollowell AE |
D3232 - D3237 |
Influence of Current Density on Orientation-Controllable Growth and Characteristics of Electrochemically Deposited Au Films Liu LT, Zhu XL, Wei SH, Zhang J, Baklanov MR, Fanta ABD, Niu JB, Xie CQ |
D3238 - D3245 |
Thermal Expansion and Thermal Stress Behavior of Electroless-Plated Fe-Ni-B Alloy Thin Film for High-Density Packaging Yamamoto T, Nagayama T, Nakamura T |
D3246 - D3253 |
In-Situ Stress Measurements during Cobalt Electrodeposition Graciano VP, Bertocci U, Stafford GR |
D3254 - D3258 |
Bottom-Up Copper Filling of Millimeter Size Through Silicon Vias Josell D, Menk LA, Hollowell AE, Blain M, Moffat TP |
D3259 - D3271 |
Effect of Chloride Concentration on Copper Deposition in Through Silicon Vias Braun TM, Josell D, Silva M, Kildon J, Moffat TP |