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Inzynieria Chemiczna i Procesowa, Vol.27, No.4, 1595-1609, 2006
Plasma chemical reactors (PCHR). Simulation of low-temperature radio-frequency discharges
A short introduction to plasma chemical reactors (PChR), being the main tool of plasma chemistry - expanding field of research and applications, is given. The main idea, process parameters and typical set-ups are presented. Authors indicate the importance of attempts to create software for design and analysis of PRCh and demonstrate existing approaches in this field. A simple robust algorithm for simulation of RF plasma has been proposed and verified by comparison to the results presented in literature. The software is fast enough to be tested on a regular PC computer.