Solar Energy Materials and Solar Cells, Vol.74, No.1-4, 247-253, 2002
Thin film poly-Si solar cells using PECVD and Cat-CVD with light confinement structure by RIE
Poly-Si film prepared by PECVD method showed low ESR spin density of around 1E16/cm(3) and poly-Si film prepared by Cat-CVD method showed relatively low ESR spin density of around 1E17/cm(3). The cell using PECVD poly-Si film as a photo-active layer showed an intrinsic cell efficiency of 7.75%. Light confinement micro-structure was introduced to the cell applying RIE method to the glass substrate surface and enhancement of Jsc was observed. (C) 2002 Elsevier Science B.V. All rights reserved.