The present work deals with the investigation of the nanostructured shape memory alloys for the purpose of development of micromechanical devices. The Ti(50)Ni(25)Cu(25) (at.%) alloy fabricated by the melt spinning technique in the form of a ribbon with a thickness around 40 mu m and a width about 1.5 mm was chosen as a starting material. Technological parameters were optimized to produce the alloy in an amorphous state. The thickness of the ribbon was reduced to 5-10 mu m by means of electrochemical polishing. A special nanostructurization of the thin ribbons was obtained via the dynamic crystallization of the amorphous alloy by application of a single electric pulse with duration near 500 mu s. A composite micromanipulator with overall dimensions of 20 x 5 x 0.9 mu m was developed and produced on the basis of the obtained nanostructured thin ribbons by means of the focused ion beam (FIB) technique. (C) 2011 Elsevier B.V. All rights reserved.