화학공학소재연구정보센터
홈 로그인 로그아웃 연락처 사이트맵
Journal of the Korean Industrial and Engineering Chemistry, Vol.11, No.5, 451-457, August, 2000
Export Citation
자기 조립 단분자막과 미세접촉인쇄
Self-Assembled Monolayer (SAM) and Micro-contract Printing
정덕영†
  • 성균관대학교 자연과학부 화학과, 수원 440-746
Duk Young Jung†
  • Department of Chemistry, Sunkyunkwan University, Suwon 440-746, Korea
E-mail:
초록
소프트 전사법은 최근 마이크로 또는 나노 크기의 광범위한 재료를 만들 수 있는 훌륭한 방법으로 부각되고 있다. 미세접촉인쇄는 자기조립 단분자막을 응용하여 여러 가지 기질의 표면 특성을 선택적으로 변환시킬 수 있다. 자기조립 단분자막의 층을 사용하여 소수성의 표면으로 변환시키면 사용하는 기질의 표면 중에서 선택적인 영역에만 증착이 가능하다. 미세접촉인쇄를 사용한 이와 같은 표면개질을 이용하여 졸-겔방법, 화학용액증착, 금속-유기 화학기 기상 증착 등의 박막을 제작하는 몇 가지 증착 방법과 결합시키면 박막의 패터닝을 손쉽게 할 수 있다. 알킬실란을 자기조립 단분자막으로 이용하여 미세접촉인쇄를 실행하고 박막을 선택적으로 증착하였다.
Soft-lithography has recently become a very promising technique for micro-/nanostructuring a wide range of materials. The micro- contact printing method can be used to build a self-assembled monolayer (SAM), which results in surface modification of selected area on various substrates. Patterned thin layers of the SAM give the hydrophobic characteristics to the printed surface and induce weak adhesion of deposited materials to the substrates used. The surface modification by the micro- contact printing was combined with conventional thin-film techniques such as sol-gel chemistry, chemical solution deposition and metal-organic chemical vapor deposition (MOCVD). The successful patterning could be performed for metals, TiO2, CdS, Pb(Zr, Ti)O3 and LaMnO3 thin-film on various substrates by using microcontact printed alkylsilanes as resist.
Keywords:self-assembled monolayer;micro-contact printing;soft-lithography;patterning
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