Nanophased ZrO2-CeO2 films can be obtained by depositing the two oxides contemporaneously using zirconium tris-isopropoxy 2,2,6,6-tetramethyl-3,5-heptanedionate and cerium tetrakis-2,2,6,6-tetramethyl-3,5-heptanedionate, as CVD (Chemical Vapour Deposition) precursors. The density and refractive index produced higher results than in the films of zirconia and ceria grown separately. X-ray diffraction analysis showed only a pattern intermediate between the cubic patterns of ceria and zirconia. The annealing procedure at 1000 degreesC in air maintained the position of the peaks and the crystallite size increased from 5 to about 40 nm. The shifts of the peaks is attributed to the formation of a-solid solution of CeO2 and ZrO2 in the cubic phase. A relationship was estimated between the cell parameter and the composition of the solid solution films.