Materials Science Forum, Vol.423-4, 297-300, 2003
Multi-layer film metallization of AlN ceramic and its sealing to metal
Aiming to the application of AIN ceramic in microwave tube, this report presents the brazing technology of AIN ceramic to metal, in which multi-layer metal films with different functions were formed on the surface of AIN ceramic through magnetron-controlled sputtering and electroplating to ensure high vacuum tightness and high tensile strength of the joints.