광화학증착법에 의한 직접패턴 PZT 박막의 제조 및 특성

박형호; 박형호; 김태송; Ross H. Hill; Hyeong-Ho Park; Hyung-Ho Park; Tae Song Kim; Ross H. Hill

Korean Journal of Materials Research, Vol.18, No.2, 98-102, February, 2008

DOI10.3740/MRSK.2008.18.2.098 Export Citation

광화학증착법에 의한 직접패턴 PZT 박막의 제조 및 특성

Fabrication and Characterization of Direct-Patternable PZT Film Prepared by Photochemical Metal-Organic Deposition

박형호, 박형호^†, 김태송¹, Ross H. Hill²

연세대학교 신소재공학부
¹한국과학기술연구원
²Department of Simon Fraser University

Hyeong-Ho Park, Hyung-Ho Park^†, Tae Song Kim¹, and Ross H. Hill²

School of Advanced Materials Science and Engineering, Yonsei University, Seoul 120-749, Korea
¹Microsystem Research Center, Korea Institute of Science and Technology, Seoul 136-791, Korea
²4D Labs and Department of Chemistry, Simon Fraser University, Burnaby, B.C. V5A 1S6, Canada, Korea

E-mail:

The ferroelectric properties of UV irradiated and non-irradiated PZT films prepared via photochemical metal-organic deposition using photosensitive precursors were characterized. Fourier transform infrared spectroscopy showed that complete removal of organic groups was possible through UV exposure of the spin-coated PZT precursor films at room temperature. The measured remnant polarization values of UVirradiated and non-irradiated PZT films after annealing at 650oC were 29 and 23 μC/cm2, respectively. The UV irradiation was found to be effective for the enhancement of the <111> growth orientation and ferroelectric property of PZT film and in the direct patterning in the fabrication of micro-patterned systems without dry etching.

Keywords:PZT;UV-irradiation;photochemical metal-organic deposition;direct-patterning

[References]

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Lee CK, Kim WS, Park HH, Thin Solid Films, 464, 155 (2004)
Goux L, Wouters DJ, J. Appl. Phys., 100, 124102 (2006)
Fujimori Y, Nakamura T, Takasu H, Jpn. J. Appl. Phys., 38, 5346 (1999)
Petroff TE, Tandon RP, J. Appl. Phys., 81, 876 (1997)
Lee JK, Kim TY, Chung I, Desu SB, Appl. Phys. Lett., 75, 334 (1999)
Soyer C, Cattan E, Remiens D, Guilloux-Viry M, J. Appl. Phys., 92, 1048 (2002)
Avey AA, Hill RH, J. Am. Chem. Soc., 118(1), 237 (1996)
Andronic LS, Hill RH, J. Photoch. Photobio. A, 152, 259 (2002)
Hong CS, Park HH, Moon J, Park HH, Thin Solid Films, 515(3), 957 (2006)
Trudel S, Hill RH, Polyhedron, 26, 1863 (2007)
Park HH, Park HH, Hill RH, Sens. Actuators. A, 132, 429 (2006)
Shinmou K, Tohge N, Minami T, Jpn. J. Appl. Phys., 33, L1181 (1994)
Barnum DW, J. Inorg. Nucl. Chem., 21, 221 (1961)
Li G, Preparation of layered materials by photochemical deposition of Pb(ZrxTi1-x)O3 and (BaySr1-y)TiO3 layers, p.6, Master thesis, Simon Fraser University, Canada, (2002). (2002)
Bravo-Vasquez JP, Solid-state photochemistry of thin films: Metal organic deposition from mesomorphous and amorphous films of inorganic complexes, Ph.D. thesis, p.6, Simon Fraser University, Canada, (2001). (2001)
Allen NS, Photopolymerisation and photoimaging science and technology, 1st ed., p.2, Elsevier Applied Science, London, England, (1989). (1989)
Blair SL, Chu CW, Dammel R, Hill RH, Proc. SPIE, 3049, 829 (1997)
Wang FP, Yu YJ, Jiang ZH, Zhao LC, Mater. Chem. Phys., 77, 10 (2002)
Zhang JY, Boyd IW, Jpn. J. Appl. Phys. A, 4, L393 (1999)
Ha SM, Kim WS, Park HH, Kim TS, Ferroelectrics, 273, 35 (2002)
Tani T, Xu Z, Payne DA, Mater. Res. Soc. Symp. Proc., 310, 269 (1993)
Cao D, Jeong IK, Heffner RH, Darling T, Lee JK, Bridges F, Park JS, Hong KS, Phys. Rev. B, 70, 224102 (2004)
Cheon CI, Kim HG, J. Korean Ceram. Soc., 30, 859 (1993)
Rao WF, Wang YY, Appl. Phys. Lett., 90, 182906 (2007)
Cheng J, Zhu W, Li N, Cross LE, J. Appl. Phys., 91, 5997 (2002)
Oh SH, HM, Appl. Phys. Lett., 72, 1457 (1998)
Hu SH, Hu GJ, Meng XJ, Wang GS, Sun JL, Guo SL, Chu JH, Dai N, J. Cryst. Growth, 260(1-2), 109 (2004)

[1] Chen Y, Mclntyre PC, Appl. Phys. Lett., 91, 232906 (2007)

[2] Lee CK, Kim WS, Park HH, Thin Solid Films, 464, 155 (2004)

[3] Goux L, Wouters DJ, J. Appl. Phys., 100, 124102 (2006)

[4] Fujimori Y, Nakamura T, Takasu H, Jpn. J. Appl. Phys., 38, 5346 (1999)

[5] Petroff TE, Tandon RP, J. Appl. Phys., 81, 876 (1997)

[6] Lee JK, Kim TY, Chung I, Desu SB, Appl. Phys. Lett., 75, 334 (1999)

[7] Soyer C, Cattan E, Remiens D, Guilloux-Viry M, J. Appl. Phys., 92, 1048 (2002)

[8] Avey AA, Hill RH, J. Am. Chem. Soc., 118(1), 237 (1996)

[9] Andronic LS, Hill RH, J. Photoch. Photobio. A, 152, 259 (2002)

[10] Hong CS, Park HH, Moon J, Park HH, Thin Solid Films, 515(3), 957 (2006)

[11] Trudel S, Hill RH, Polyhedron, 26, 1863 (2007)

[12] Park HH, Park HH, Hill RH, Sens. Actuators. A, 132, 429 (2006)

[13] Shinmou K, Tohge N, Minami T, Jpn. J. Appl. Phys., 33, L1181 (1994)

[14] Barnum DW, J. Inorg. Nucl. Chem., 21, 221 (1961)

[15] Li G, Preparation of layered materials by photochemical deposition of Pb(ZrxTi1-x)O3 and (BaySr1-y)TiO3 layers, p.6, Master thesis, Simon Fraser University, Canada, (2002). (2002)

[16] Bravo-Vasquez JP, Solid-state photochemistry of thin films: Metal organic deposition from mesomorphous and amorphous films of inorganic complexes, Ph.D. thesis, p.6, Simon Fraser University, Canada, (2001). (2001)

[17] Allen NS, Photopolymerisation and photoimaging science and technology, 1st ed., p.2, Elsevier Applied Science, London, England, (1989). (1989)

[18] Blair SL, Chu CW, Dammel R, Hill RH, Proc. SPIE, 3049, 829 (1997)

[19] Wang FP, Yu YJ, Jiang ZH, Zhao LC, Mater. Chem. Phys., 77, 10 (2002)

[20] Zhang JY, Boyd IW, Jpn. J. Appl. Phys. A, 4, L393 (1999)

[21] Ha SM, Kim WS, Park HH, Kim TS, Ferroelectrics, 273, 35 (2002)

[22] Tani T, Xu Z, Payne DA, Mater. Res. Soc. Symp. Proc., 310, 269 (1993)

[23] Cao D, Jeong IK, Heffner RH, Darling T, Lee JK, Bridges F, Park JS, Hong KS, Phys. Rev. B, 70, 224102 (2004)

[24] Cheon CI, Kim HG, J. Korean Ceram. Soc., 30, 859 (1993)

[25] Rao WF, Wang YY, Appl. Phys. Lett., 90, 182906 (2007)

[26] Cheng J, Zhu W, Li N, Cross LE, J. Appl. Phys., 91, 5997 (2002)

[27] Oh SH, HM, Appl. Phys. Lett., 72, 1457 (1998)

[28] Hu SH, Hu GJ, Meng XJ, Wang GS, Sun JL, Guo SL, Chu JH, Dai N, J. Cryst. Growth, 260(1-2), 109 (2004)