UV를 사용한 SAMs 패터닝과 PEDOT의 선택적 증착에 관한 연구

권태욱; 이정길; 이재갑; T.W. Kwon; J. Lee; J.G. Lee

Korean Journal of Materials Research, Vol.16, No.10, 619-623, October, 2006

DOI10.3740/MRSK.2006.16.10.619 Export Citation

UV를 사용한 SAMs 패터닝과 PEDOT의 선택적 증착에 관한 연구

Patterning of poly(3,4-ethylenedioxythiophene)(PEDOT) Thin Films by Using Self-assembled Monolayers(SAMs) Patterns Formed by Ultra-violet(UV) Lithography

권태욱, 이정길, 이재갑 ^†

국민대학교 신소재공학부

T.W. Kwon, J. Lee, and J.G. Lee^†

School of Advanced Materials Engineering, Kookmin University, 861-1, Jeongneung-dong, Seongbuk-gu, Seoul, 136-702, Korea

E-mail:

Selective vapor deposition of conductive poly(3,4-ethylenedioxythiophene) (PEDOT), thin films has been carried out on self assembled monolayers patterned oxide substrate. Since the 3,4-ethylenedioxythiophene(EDOT) monomer can be polymerized only in the presence of oxidant such as , the PEDOT thin film is selectively deposited on patterned , which only adsorbs on the partly removed SAMs region due to the inability of to adsorb on SAMs. Therefore, the partly removed SAMs can act as an adsorption layer for the and also as a glue layer for the deposition of PEDOT, resulting in the significantly increased adhesion of PEDOT to substrate. The use of UV lithography and Cr patterned quartz mask provided the formation of SAMs patterns on oxide substrates, which allowed for the selective deposition of conductive PEDOT thin films. new process was successfully developed for the selective deposition of PEDOT thin films on SAMs patterned oxide substrate, providing a new way for the patterning of vapor phase deposition of PEDOT thin films with accurate alignment and addressing the inherent adhesion issues between PEDOT and dielectrics.

Keywords:PEDOT;SAMs;Selective deposition

[References]

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[Related Articles]

[1] Thackeray JW, White HS, Wrighton MS, J. Phys. Chem., 89, 5133 (1985)

[2] Gustafsson G, Cao Y, Tracy GM, Klavetter F, Colaneri N, Heeger AJ, Nature, 35, 447 (1993)

[3] Gao Y, Heeger AJ, Lee JY, Kim CY, Synth. Met., 82, 221 (1996)

[4] Gao Y, Yu G, Zhang C, Menon R, Heeger AJ, Synth. Met., 87, 171 (1997)

[5] Scott JC, Carter SA, Karg S, Angelopoulos, M, Synth. Met., 85, 1197 (1997)

[6] Cho S, Park SH, Lee KJ, J. Korean Phys. Soc., 47, 474 (2005)

[7] Handbook of Conductive Molecules and Polymers, Nalwa HS, Editor, Vol. 1-4, Wiley, New York (1997) (1997)

[8] Yoneyama H, Wakamoto K, Tamura HJ, J. Electrochem. Soc., 32, 2414 (1985)

[9] Kaneto K, Maxfield M, Nairns DP, MacDiarmid AG, Heeger AJ, J. Chem. Soc., 78, 3417 (1982)

[10] Roncali, J. Chem. Rev., 92, 711 (1992)

[11] Hohnholz D, Okuzaki H, MacDiarmid AG, Adv. Funct. Mater., 15(1), 51 (2005)

[12] Baba A, Lubben J, Tamada K, Knoll W, Langmuir, 19(21), 9058 (2003)

[13] De Leeuw DM, Kraakman PA, Bongaerts PEG, Mutsaers CMJ, Klaassen BBM, Synth. Met., 66, 263 (1994)