IPA 저온 접합법을 이용한 PMMA Micro CE Chip의 제작

차남구; 박창화; 임현우; 조민수; 박진구; Nam-Goo Cha; Chang-Hwa Park; Hyun-Woo Lim; Min-Soo Cho; Jin-Goo Park

Korean Journal of Materials Research, Vol.16, No.2, 99-105, February, 2006

DOI10.3740/MRSK.2006.16.2.099 Export Citation

IPA 저온 접합법을 이용한 PMMA Micro CE Chip의 제작

Fabrication of PMMA Micro CE Chip Using IPA Assisted Low-temperature Bonding

차남구, 박창화, 임현우, 조민수, 박진구 ^†

한양대학교 재료화학공학부 마이크로바이오칩센터

Nam-Goo Cha, Chang-Hwa Park, Hyun-Woo Lim, Min-Soo Cho, and Jin-Goo Park^†

Division of Materials and Chemical Engineering, Micro Biochip Center, Hanyang University, Ansan, 426-791, South Korea

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This paper reports an improved bonding method using the IPA (isopropyl alcohol) assisted low-temperature bonding process for the PMMA (polymethylmethacrylate) micro CE (capillary electrophoresis) chip. There is a problem about channel deformations during the conventional processes such as thermal bonding and solvent bonding methods. The bonding test using an IPA showed good results without channel deformations over 4 inch PMMA wafer at 60 ? C and 1.3 bar for 10 minutes. The mechanism of IPA bonding was attributed to the formation of a small amount of vaporized acetone made from the oxidized IPA which allows to solvent bonding. To verify the usefulness of the IPA assisted low-temperature bonding process, the PMMA micro CE chip which had a 45μm channel height was fabricated by hot embossing process. A functional test of the fabricated CE chip was demonstrated by the separation of fluorescein and dichlorofluorescein. Any leakage of liquids was not observed during the test and the electropherogram result was successfully achieved. An IPA assisted low-temperature bonding process could be an easy and effective way to fabricate the PMMA micro CE chip and would help to increase the yield.

Keywords:Hot Embossing . PMMA (polymethylmethacrylate);Capillary Electrophoresis;Plastic Chip;Thermal Bonding;IPA (isopropyl alcohol)

[References]

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Chou SY, Krauss PR, Renstrom PJ, Appl. Phys. Lett., 67, 3114 (1995)
Cha NG, Park CH, Lim HW, Park JG, Jeong JH, Lee ES, Korean J. Mater. Res., 15(9), 589 (2005)
Heo YS, Chung S, Choi KC, Chung C, Han DC, Chang JK, J. Chromatography A, 1013, 111 (2003)
Altria KD, J. Chromatography A, 1, 1 (1999)
Guber AE, Heckele M, Herrmann D, Muslija A, Saile V, Eichhorn L, Gietzelt T, Hoffmann W, Hauser PC, Tanyanyiwa J, Gerlach A, Gottschlich N, Knebel G, Chem. Eng. J., 101(1-3), 447 (2004)
Bilitewski U, Genrich M, Kadow S, Mersal G, Anal. Bioanal. Chem., 377, 556 (2003)
Lee GB, Chen SH, Huang GR, Sung WC, Lin YH, Sensors and Actuator B, 75, 142 (2001)
Ling SF, Luan J, Li X, Ang WLY, NDT & E International, 39, 13 (2006)
Wang J, Pumera M, Chatrathi MP, Escarpa A, Konrad R, Griebel A, Dorner W, Lowe H, Electrophoresis, 23(4), 596 (2002)
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From Wikipedia, http://en.wikipedia.org/wiki/Isopropyl_alcohol

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[1] Xu F, Jabasini M, Liu S, Baba Y, Analyst, 118, 589 (2003)

[2] Chen Z, Gao Y, Lin J, Su R, Xie Y, J. Chromatography A, 1038, 239 (2004)

[3] Lin ZG, Tseng SC, Wang J, Su YC, AlP Conference Proceedings, 712, 1547 (2004)

[4] Oh SY, Oh JH, Choi JW, J. Korean Ind. Eng. Chem., 14(1), 35 (2003)

[5] Juha L, Bittner M, Chvostova D, Letal V, Krasa J, Otcenasek Z, Kozlova M, Polan J, Prag AR, Rus B, Stupka M, Krzywinski J, Andrejczuk A, Pelka JB, Sobierajski R, Rye L, Feldhaus J, Boody FP, Grisham ME, Vaschenko GO, Menoni CS, Rocca JJ, J. Electron Spectroscopy and Related Phenomena, 144, 929 (2005)

[6] Tuomikoski S, Franssila S, Sensors and Actuators A, 110, 408 (2005)

[7] Alternative Lithography, Edited by Sotomayor Torres CM, Kluwer Academic Publishers (2003) (2003)

[8] Schulz H, Lyebyedyev D, Scheer HC, Pfeiffer K, Bleidiessel G, Grutzner G, Ahopelto J, J. Vac. Sci. Technol. B, 18(6), 3582 (2000)

[9] Chou SY, Krauss PR, Renstrom PJ, Appl. Phys. Lett., 67, 3114 (1995)

[10] Cha NG, Park CH, Lim HW, Park JG, Jeong JH, Lee ES, Korean J. Mater. Res., 15(9), 589 (2005)

[11] Heo YS, Chung S, Choi KC, Chung C, Han DC, Chang JK, J. Chromatography A, 1013, 111 (2003)

[12] Altria KD, J. Chromatography A, 1, 1 (1999)

[13] Guber AE, Heckele M, Herrmann D, Muslija A, Saile V, Eichhorn L, Gietzelt T, Hoffmann W, Hauser PC, Tanyanyiwa J, Gerlach A, Gottschlich N, Knebel G, Chem. Eng. J., 101(1-3), 447 (2004)

[14] Bilitewski U, Genrich M, Kadow S, Mersal G, Anal. Bioanal. Chem., 377, 556 (2003)

[15] Lee GB, Chen SH, Huang GR, Sung WC, Lin YH, Sensors and Actuator B, 75, 142 (2001)

[16] Ling SF, Luan J, Li X, Ang WLY, NDT & E International, 39, 13 (2006)

[17] Wang J, Pumera M, Chatrathi MP, Escarpa A, Konrad R, Griebel A, Dorner W, Lowe H, Electrophoresis, 23(4), 596 (2002)

[18] Grass B, Neyer A, Johnck M, Siepe D, Eisenbei F, Weber G, Hergenroder R, Sensors and Actuators B, 72, 249 (2001)

[19] From Wikipedia, http://en.wikipedia.org/wiki/Isopropyl_alcohol