15 nm-Co/15 nm-Ni/P-Si(100)[Type I] and 15 nm-Ni/15 nm-Co/P-Si(100)(Type II) bilayer structures were annealed using a rapid thermal annealer for 40sec at 700/sim1100 ? C . The annealed bilayer structures developed into composite NiCo silicides and resulting changes in sheet resistance, composition and microstructure were investigated using Auger electron spectroscopy and transmission electron microscopy. Prepared NiCoSix films were further treated in a sequential annealing set up from 900∼1100 ? C with 30 minutes. The sheet resistances of NiCoSix from Type I maintained less than 7Ω/sq . even at the temperature of 1100?C , while those of Type II showed about 5Ω/sq . with the thinner and more uniform thickness. With the additive post annealing, the sheet resistance for all the composite silicides remained small up to 900 ? C . The proposed NiCoSix films were superior over the conventional single-phased silicides and may be easily incorporated into the sub-0.1 μm process.