실리콘을 첨가한 주석 산화물 박막의 전기 화학적 특성

이상헌; 박건태; 손영국; Sang-Heon Lee; Keon-Tae Park; Young-Guk Son

Korean Journal of Materials Research, Vol.12, No.4, 240-247, April, 2002

DOI10.3740/MRSK.2002.12.4.240 Export Citation

실리콘을 첨가한 주석 산화물 박막의 전기 화학적 특성

Electrochemical Characteristics of Silicon-Doped Tin Oxide Thin Films

이상헌^†, 박건태, 손영국

부산대학교 무기재료공학과

Sang-Heon Lee^†, Keon-Tae Park, and Young-Guk Son

School of Materials Science and Engineering, Pusan National University, Pusan 609-735, Korea

E-mail:

Tin oxide thin films doped with silicon as anodes for lithium secondary battery were fabricated by R.F. magnetron sputtering technique. The electrochemical results showed that the irreversible capacity was reduced during the first discharge/charge cycle, because the audition of silicon decreased the oxidic state of Tin. Capacity was increased with the increase of substrate temperature, however decreased with the increase of RTA temperatures. The reversible capacity of thin films fabricated under the substrate temperature of 300 ? C and the Ar: O 2 ratio of 7:3 was 700mA/g.

Keywords:SnO 2;R.F. magnetron sputtering;Lithium secondary battery

[References]

Nagaura T, Proc. 4th Intern. Seminar on Lithium Battery Technology and Applications, Deerfield Beache, Fl, March, 5-6 (1990) (1990)
Kennedy JH, Thin Solid Film, 43, 41 (1997)
Woo TU, Son YG, J. Kor. Ceram. Soc., Fabrication and Characterization of LiMn 2 O 4 Cathode for Litium Rechargeable Battery by R.F. Magnetron Sputtering, 37(6), 552 (2001)
Courtney IA, Dahn JR, J. Electrochem. Soc., Key Factors Controlling the Reversibility of the Reaction of Lithium with SnO 2 , BPO 6 , and SnO 2 Glass, 144, 6 (1997)
Idota Y, Kubota T, Matusufuji A, Maekawa Y, Miyasaka T, Science, Tin-based Amorphous Oxide: A High-Capacity Lithium Ion-Storage Materials, 276(30), 1395 (1997)
Huggins RA, Solid State Ion., 113-115, 57 (1998)
Huang H, Kelder EM, Chen L, Schoonman J, J. Power Sources, 81-82, 362 (1999)

[1] Nagaura T, Proc. 4th Intern. Seminar on Lithium Battery Technology and Applications, Deerfield Beache, Fl, March, 5-6 (1990) (1990)

[2] Kennedy JH, Thin Solid Film, 43, 41 (1997)

[3] Woo TU, Son YG, J. Kor. Ceram. Soc., Fabrication and Characterization of LiMn 2 O 4 Cathode for Litium Rechargeable Battery by R.F. Magnetron Sputtering, 37(6), 552 (2001)

[4] Courtney IA, Dahn JR, J. Electrochem. Soc., Key Factors Controlling the Reversibility of the Reaction of Lithium with SnO 2 , BPO 6 , and SnO 2 Glass, 144, 6 (1997)

[5] Idota Y, Kubota T, Matusufuji A, Maekawa Y, Miyasaka T, Science, Tin-based Amorphous Oxide: A High-Capacity Lithium Ion-Storage Materials, 276(30), 1395 (1997)

[6] Huggins RA, Solid State Ion., 113-115, 57 (1998)

[7] Huang H, Kelder EM, Chen L, Schoonman J, J. Power Sources, 81-82, 362 (1999)