In this work, we have modeled the impact of substrate depletion in fully-depleted silicon-on-insulator (FDSOI) transistor and have extensively verified the model for both NMOS and PMOS with geometrical and temperature scaling. The model has an accurate behavior for C-V and I-V characteristics and preserves the smooth behavior of the high order derivatives. Model validation is done at 50 nm technology node with state of the art FDSOI transistors provided by Low-power Electronics Association and Project (LEAP) and excellent agreement with the experimental data is achieved after parameter extraction. (C) 2014 Elsevier Ltd. All rights reserved.