화학공학소재연구정보센터
Journal of Materials Science, Vol.28, No.24, 6691-6698, 1993
The Role of Drying-Control Chemical Additives on the Preparation of Sol-Gel Derived PLZT Thin-Films
Films of Pbx/100La(x)/100(Zry/100 Tiz/100)1-x/400O3 with x = 8, y = 65 and z = 35 (PLZT(8/65/35)) with a single perovskite structural phase were successfully prepared by using drying-control chemical additives in sol-gel processing followed by rapid thermal annealing at 600-degrees-C for only 1 min on Si(Pt) substrates. The roles of the drying-control chemical additives ethylene glycol and formamide in the gel preparation were studied. The hysteresis loop of PLZT(8/65/35) thin film was measured. The remanent polarization and coercive field were found to be about 1.3 muC cm-2 and 15 kV cm-1, respectively.