Y-doped CaCuO2 films have been formed on SrTiO3 (100) substrates in the range 730-790-degrees-C. The lattice constants of c = 0.3180 approximately 0.3183 nm were estimated from the X-ray diffraction (XRD) of c-axis-oriented Y-doped CaCuO2 films. The values of the c-axis were shorter than those of the undoped CaCuO2 film. Although the resistivity of a Y-doped CaCuO2 film significantly lower in comparison with that of an undoped CaCuO2 film, no superconductivity was found in these Y-doped CaCuO2 films at temperatures higher than 12 K.