TiO2 and Cu-TiO2 thin films were deposited by e-beam evaporation and then annealed at 350 and 500 degrees C. Their structure, surface morphology and optical properties were studied by X-ray diffraction, scanning electron microscopy, cross-sectional TEM, UV-vis, FT-IR spectroscopy and X-ray absorption spectroscopy. A single-phase source material was used for the first time in the deposition process, thus avoiding preferential evaporation of Cu with respect to TiO2, and resulting in an even concentration of Cu in the doped films. The photocatalytic activity was evaluated by degradation of pre-adsorbed methylene blue (MB) in dry conditions and gaseous 2-propanol in oxygen atmosphere under visible and simulated solar light, respectively. Results suggested that high surface hydroxylation of the as-deposited films is an important factor for MB oxidation occurring through a dye-sensitized mechanism activated by visible light absorption. Conversely, the rate of photodegradation of 2-propanol is enhanced in annealed samples due to the greater crystallinity and less electron-hole recombination, with the TiO2 annealed at 500 degrees C being the most efficient photocatalyst. However, Cu-doped samples resulted the most active samples during the degradation of MB under visible radiation. Finally, the performance at increasing thickness (250, 500, 1000, up to 2000 nm) was tested for the most reactive films revealing a marked rise in photocatalytic activity up to 1000 nm. (C) 2016 Elsevier B.V. All rights reserved.