화학공학소재연구정보센터
홈 로그인 로그아웃 연락처 사이트맵
Korean Journal of Materials Research, Vol.28, No.11, 627-632, November, 2018
DOI10.3740/MRSK.2018.28.11.627  Export Citation
Residue Free Fabrication of Suspended 2D Nanosheets for in-situ TEM Nanomechanics
Rakesh Sadanand Sharbidre1, 2, Ji Cheol Byen1, Gyeong Yeol Yun1, Jae-Kyung Ryu3, Chang Jun Lee2, 4, Seong-Gu Hong2, 5, Sachin Bramhe1, and Taik Nam Kim1, †
  • 1Department of Material Science Engineering, Paichai University, Daejeon 35345, Republic of Korea
  • 2Division of Industrial Metrology, Korea Research Institute of Standards and Science, Daejeon 34113, Republic of Korea
  • 3Department of Dental Technology and Science, ShinHan University, Korea
  • 4School of Mechanical Engineering, Chonnam National University, Gwangju 61186, Republic of Korea
  • 5Department of Nano Science, University of Science and Technology, Daejeon 34054, Republic of Korea
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Two dimensional(2D) crystals, composed of a single layer or a few atomic layers extracted from layered materials are attracting researchers’ interest due to promising applications in the nanoelectromechanical systems. Worldwide researchers are preparing devices with suspended 2D materials to study their physical and electrical properties. However, during the fabrication process of 2D flakes on a target substrate, contamination occurs, which makes the measurement data less reliable. We propose a dry transfer method using poly-methyl methacrylate(PMMA) for the 2D flakes to transfer onto the targeted substrate. The PMMA is then removed from the device by an N-Methyl-2-pyrrolidone solution and a critical point dryer, which makes the suspended 2D flakes residue free. Our method provides a clean, reliable and controllable way of fabricating micrometer-sized suspended 2D nanosheets.
Keywords:graphene;molybdenum disulphide;suspended nanosheet;dry transfer;poly-methyl methacrylate
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