Superconducting YBa2Cu3O7-delta films with different amounts of BaZrO3 nanoinclusions were deposited on SrTiO3(001) by low-fluorine chemical solution deposition with the aim of introducing artificial vortex pinning centres. The Zr concentration over the film thickness could be determined by X-ray photoelectron spectroscopy combined with Ar+ ion etching. The Zr/Y ratio has a constant behaviour in the film's bulk. Zr segregation occurs near the surface and Zr diffusion into the substrate is observed near the interface. Conversely, Sr and Ti from the substrate diffuse into the films. Y3d lineshape analysis and X-Ray Diffraction data pointed out that Ti diffusion causes the formation of Y-Ti-O based spurious phases.