화학공학소재연구정보센터
홈 로그인 로그아웃 연락처 사이트맵
Polymer(Korea), Vol.44, No.4, 527-534, July, 2020
DOI10.7317/pk.2020.44.4.527  Export Citation
UV 임프린트 리소그래피 공정을 통한 친환경적인 다양한 패턴필름의 제조와 특성분석
Preparation and Characterization of Environment Friendly Various Pattern Film via UV Imprint Lithography Process
정민희1, 2, 육지호2, 이승준2, †
  • 1서원대학교 BIT융합대학 제약공학과 의공학연구실
  • 2인하대학교 화학∙화학공학융합학과
Min-Hui Jeong1, 2, Ji-Ho Youk2, and Seung-Jun Lee1, †
  • 1Biomedical Engineering Lab., Department of Pharmaceutical Science and Engineering, Seowon University, Chungju 28674, Korea
  • 2Department of Chemical Engineering, Inha University, Incheon 22212, Korea
E-mail:
초록
임프린트 리소그래피 공정(ILP) 중, 자외선(UV) 광선을 이용한 ILP 기술은 패턴이 형성된 마스터를 사용하여 몰드를 제작하고, 제작된 몰드로 UV 경화성 레진(resin)을 일정한 압력(낮은 압력)으로 눌러준 다음, UV 조사하여 레진을 경화시킨 후, 몰드를 떼어내어 패턴을 전사시키는 방법이다. 이 방법은 고온과 고압이 필요로 하는 thermal ILP 기술보다 간단하고, 효율적인 방법이다. 본 연구에서는 다양한 패턴형성을 위해 UV-ILP 기술로 진행하였고, UV 경화성 레진은 친환경적인 아크릴계 레진을 사용하였다. 이 레진에는 불소성분을 함유하지 않아 낮은 발수성을 가질 수 있어 ILP 기술로 표면의 패턴을 다양하게 형성하여 초발수의 표면특성을 구현했다. 제작한 다양한 패턴필름의 표면형상, 경도, 접촉각, 및 열적특성 등의 평가를 수행하였고, 결론적으로 평면 타입 패턴필름 대비 육각형 패턴필름에서 120° 이상의 높은 발수성을 확인할 수 있었다.
During the imprint lithography process (ILP), ILP technology using ultraviolet (UV) light is the method of pressing UV curing resins at a constant pressure (low pressure) with mold fabricated using pattern master, then UV irradiation, hardening resins, and then pulling away and transcription. This method is simpler and more efficient than the thermal ILP technology, which requires high temperature and high pressure. Thus, in this study, the UV-ILP for various pattern formulation was conducted, and the UV curing resin developed was used with environment-friendly acrylic resin. The resin does not contain fluorine, making it difficult to develop hydrophobic properties. Thus, by different mold surface patterns through the imprint process, acrylic resin also showed the super-hydrophobic surface characteristics. To evaluate the physical characteristics of UV curing resins developed, the surface properties, hardness, contact angle, and thermal characteristics were conducted. In conclusion, water-contact angle of honeycomb pattern film has shown the super-hydrophobic property over than 120 degree compared to the flat type pattern film.
Keywords:imprint lithography;UV curing resin;acrylic resin;environment friendly;hydrophobic
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