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Journal of Vacuum Science & Technology A, Vol.12, No.6, 2995-2998, 1994
Unique Hydride Chemistry on Silicon-PH3 Interaction with Si(100)-(2X1)
Keywords:ENERGY LOSS SPECTROSCOPY;SURFACE-CHEMISTRY;DISSOCIATIVE ADSORPTION;PH3;SI(111)-(7X7);NH3;DECOMPOSITION