Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.2, 332-334, 1995 DOI10.1116/1.579418 Export Citation Dose-Time Relation in BF3 Plasma Immersion Ion-Implantation Shao JQ, Round M, Qin S, Chan C Please enable JavaScript to view the comments powered by Disqus.
