Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.2, 381-384, 1995 DOI10.1116/1.579367 Export Citation High-Quality ZnO Thin-Films on InP Substrates Prepared by Radio-Frequency Magnetron Sputtering .1. Material Study Chang SJ, Su YK, Shei YP Keywords:SAW Please enable JavaScript to view the comments powered by Disqus.