Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.2, 385-388, 1995 DOI10.1116/1.579368 Export Citation High-Quality ZnO Thin-Films on InP Substrates Prepared by Radio-Frequency Magnetron Sputtering .2. Surface-Acoustic-Wave Device Fabrication Chang SJ, Su YK, Shei YP Please enable JavaScript to view the comments powered by Disqus.
