Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 859-864, 1995 DOI10.1116/1.579842 Export Citation The Effect of the Presheath on the Ion Angular-Distribution at the Wafer Surface Zheng J, Brinkmann RP, Mcvittie JP Please enable JavaScript to view the comments powered by Disqus.
