A high density, uniform, and compact electron cyclotron resonance (ECR) plasma source which utilizes surface-wave radiation and a near-surface magnetic field is described. The microwaves propagated through a coaxial waveguide are introduced circularly into the circumferential side of a dielectric Al2O3 disk, which is placed at the open end of a coaxial-type cavity. The ECR magnetic field is similar to three concentric planar magnetron configurations and is directed away from the dielectric surface by permanent magnets set in the center conductor of the coaxial-type cavity. A surface wave is launched from the dielectric disk surface and generates an ECR plasma. The plasma density and electron temperature are 2.0X10(11) cm(-3) and 2.2 eV, respectively, at an Ar gas pressure of 10 mTorr and a microwave power of 700 W. The ion saturation current density (I-sat) and its uniformity are 8.2 mA/cm(2) and +/-5.5% within a radius of 10 cm.