화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.16, No.5, 3148-3148, 1998
Comparison of the submicron particle analysis capabilities of Auger electron spectroscopy, time-of-flight secondary ion mass spectrometry, and scanning electron microscopy with energy dispersive x-ray spectroscopy for particles deposited on silicon wafers with one micron thick oxide layers (vol 16, pg 1825, 1998)