Journal of Vacuum Science & Technology B, Vol.12, No.6, 3149-3159, 1994
Solid Source Diffusion from Agglomerating Silicide Sources .2. Experimental Results and Analysis
Keywords:POINT-DEFECT GENERATION;LOW-THERMAL-BUDGET;ENHANCED DIFFUSION;JUNCTION FORMATION;COBALT DISILICIDE;DOPANT DIFFUSION;STABILITY;COSI2;TISI2;SI