Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3160-3165, 1994 DOI10.1116/1.587492 Export Citation Advanced Fabrication Techniques of 3-Dimensional Microstructures for Future Electronic Devices Ugajin R, Ishibashi A, Mori Y Keywords:CHEMICAL VAPOR-DEPOSITION;DOT STRUCTURES;TRANSISTOR;FIELD;WIRE Please enable JavaScript to view the comments powered by Disqus.
