Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3374-3377, 1994 DOI10.1116/1.587515 Export Citation Reactive-Ion-Beam Etching of InP in a Chlorine-Hydrogen Mixture Vawter GA, Ashby CI Keywords:CL2;SMOOTH Please enable JavaScript to view the comments powered by Disqus.
