Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3440-3443, 1994 DOI10.1116/1.587528 Export Citation Application of a High-Throughput Electron-Beam System for 0.3 Mu-M Large-Scale Integration Mizuno F, Kato M, Hayakawa H, Sato K, Hasegawa K, Sakitani Y, Saitou N, Murai F, Shiraishi H, Uchino SI Please enable JavaScript to view the comments powered by Disqus.
