Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3879-3883, 1994 DOI10.1116/1.587567 Export Citation Acid Generation Process by Radiation-Induced Reaction in Chemically Amplified Resist Films Watanabe T, Yamashita Y, Kozawa T, Yoshida Y, Tagawa S Keywords:X-RAY-LITHOGRAPHY;ELECTRON-BEAM;AMPLIFICATION Please enable JavaScript to view the comments powered by Disqus.
