Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3888-3894, 1994 DOI10.1116/1.587569 Export Citation Effect of Acid Diffusion on Performance in Positive Deep-Ultraviolet Resists Fedynyshyn TH, Thackeray JW, Georger JH, Denison MD Keywords:AMPLIFICATION Please enable JavaScript to view the comments powered by Disqus.
