Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3905-3908, 1994 DOI10.1116/1.587572 Export Citation High-Speed Positive X-Ray Resist Suitable for Precise Replication of Sub-0.25-Mu-M Features Ban H, Nakamura J, Deguchi K, Tanaka A Please enable JavaScript to view the comments powered by Disqus.
