Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.1, 15-18, 1995 DOI10.1116/1.587975 Export Citation Comparison of H+ and He+ Implant Isolation of GaAs-Based Heterojunction Bipolar-Transistors Pearton SJ, Abernathy CR, Lee JW, Ren F, Wu CS Keywords:CURRENT-INDUCED DEGRADATION;ALGAAS;CARBON Please enable JavaScript to view the comments powered by Disqus.
